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500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing

500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing

500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing

Product Details:

Place of Origin: China
Brand Name: Mingrui
Certification: ISO9001-2005
Model Number: XF-571

Payment & Shipping Terms:

Minimum Order Quantity: 1 pieces
Price: negotiable
Packaging Details: intertional carton box
Delivery Time: 15 working days after the order confirmed
Payment Terms: L/C, T/T, Western Union, MoneyGram, D/P, D/A
Supply Ability: 10000 pieces month
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Detailed Product Description
Features: 500slots , Pitch 2.38 Item Name: Ceramic Quartz Boat
Function: For Semiconductor Wafer Processing Material: Zirconia
Typical Products: Automatic Wafer Handling MOQ: 1 PCS
Packing: Safety Packing Shipping: DHL EMS UPS FEDEX TNT
Delivery: 10 Days OEM: Yes



500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat for Semiconductor Wafer Processing


Key word:  Ceramic Quartz Boat


Mingrui Manufacture zirconia Ceramic Quartz Boat used on automatic wafer handling system diffusion furnace .   As zirconia ceramic with the charactheristic of wear resistant ,  high temperature resistant, 

Ceramic Quartz Boat is a good choice for wafter carrier .  


Integrated wafer loading& unloading, unloading the diffused wafers from the Ceramic Quartz Boat

to the cassette or loading the textured wafers from the cassette to the Ceramic Quartz Boat . Available for double back-to-back wafers in one slot in Ceramic Quartz Boat which realize single side diffusion or available for single wafer in a slot for double side diffusion process. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.
A Ceramic Quartz Boat for housing a semiconductor or a solar wafer comprising
at least one wafer support member containing at least one slot capable of receiving at least a portion of a peripheral edge of a wafer, wherein in the wafer support member comprises silicon carbide; and
at least one structural member for conveying the wafer boat into and out of a processing device connected to the wafer support member , wherein the structural member is comprised of a ceramic material that is not silicon carbide.


Technical Characteristics

·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.

·With perfect detection and alarm system which guarantees the stable and automatic operation.

·With circulation method of the cassette baseplate which reduce the labor intensity.

·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;

·With recipe data design which enables the equipment to work with various kinds of Ceramic Quartz Boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.


prameter : 


500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing



Zirconia ceramic date sheet : 


Properties Units 95 Alumina 99 Alumina ZrO2
Density g / cm³ 3.65 3.92 5.95-6.0g/cm³
Water absorption % 0 0 0
Coefficient of thermal expansion 10-6/K 7.9 8.5 10.5
Modulus of Elasticity Young's Mod GPa 280 340 210
Poisson's ratio / 0.21 0.22 0.3
HV Hardness HV MPa 1400 1650 1300-1365
Flexural Strength @ room temperature MPa 280 310 950
Flexural Strength @700°C MPa 220 230 210
Compressive Strength @ room temperature MPa 2000 2200 2000
Fracture Toughness MPa *m 1/2 3.8 4.2 10
Heat conductivity @ room temperature W/ m*k 18-25 26-30 2-2.2
Electrical Resistivity @ room temperature Ω*mm2 /m >1015 >1016 >1015
Max use temperature °C 1500 1750 1050
Resistance to acid alkaline / high high high
Dielectric Constant / 9.5 9.8 26
Dielectric Strength KV/mm 16 22 /
Thermol Shock Resistance △ T ( °C ) 220 180-200 280-350
Tensile Strength @ 25 °C MPa 200 248 252



To see how we can assist you with your solar energy project, contact us today.


500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing


500 Slots Pitch 2.38 Zirconia Ceramic Quartz Boat For Semiconductor Wafer Processing



Industrial Ceramic Intriduction

Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.

Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.


Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:




Q: Are you trading company or manufacturer ?

A: We are factory.

Q: How long is your delivery time?

A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.

Q: Do you provide samples ? is it free or extra ?

A: Yes, we could offer the sample for free charge but do not pay the cost of freight.

Q: What is your terms of payment ?

A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.

If you have any other question, pls feel free to contact us .



Contact Details
Dongguan Ming Rui Ceramic Technology Co.,ltd

Contact Person: Admin deng

Tel: 86-18122974730

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