Dongguan Ming Rui Ceramic Technology Co., Ltd
|Place of Origin:||China|
|Certification:||ISO9001 - 2015|
|Minimum Order Quantity:||1pieces|
|Packaging Details:||international carton box|
|Delivery Time:||15 working days after the order confirmed|
|Payment Terms:||L/C, T/T, Western Union, MoneyGram, D/P, D/A|
|Supply Ability:||1000 pieces per month|
|Item:||Ceramic E Chucks||Machine:||Semiconductor Equipment|
|Semiconductor:||Yes||Function:||Pick Up Wafer|
|Port Type:||Vacuum Port||Sample:||Available|
superior technical ceramics
Semiconductor Ceramic E-chuck Product Description
Products : Chucks and wafer end-effectors
Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.
Ceramic components can be used in the following semiconductor process equipment :
Mingrui can offer the following products :
The most commonly used ceramic materials are :
Ceramic End - Effectors, Endeffector, Endeffectors, Wafer Carrier, Wafer Chuck, Wafer Pick - Up Tools, Wafer Tools: NetMotion, Inc. web site
|Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. the durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in chemically harsh environment.|
|Standard 12" and 8" Coated Alumina End-Effectors|
|Properties & Application Note|
End effectors constitute the end of the robot arm which handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.
Ceramic end effectors are used for their stiffness and high strength, meaning the robot arm settles to its final position faster than with aluminium. Additionally, the robot’s motion itself is faster, optimising positioning accuracy and increasing efficiency.
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