Home ProductsAdvanced Technical Ceramics

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

Product Details:

Place of Origin: China
Brand Name: Mingrui
Certification: ISO9001-2005
Model Number: XF-574

Payment & Shipping Terms:

Minimum Order Quantity: 1 pieces
Price: negotiable
Packaging Details: intertional carton box
Delivery Time: 15 working days after the order confirmed
Payment Terms: L/C, T/T, Western Union, MoneyGram, D/P, D/A
Supply Ability: 10000 pieces month
Contact Now
Detailed Product Description
Features: 500slots , Pitch 2.38 Item Name: Ceramic Wafer Boat
Function: For Semiconductor Wafer Processing Material: Zirconia
Typical Products: Automatic Wafer Handling MOQ: 1 PCS
Packing: Safety Packing Shipping: DHL EMS UPS FEDEX TNT
Delivery: 10 Days OEM: Yes

 

 

Chemical Corrosive Zirconia Ceramic Wafer Boat in Semiconductor Chip Processing

 

Key word:  Ceramic wafer carrier 

 

To reduce and/or eliminate damage to wafers during the process steps and during transport to and from the various devices, the wafers are carried on carrier devices or “Ceramic wafer carrier ”. The wafer boats are necessarily subjected to the same corrosive chemicals and/or high temperatures under which the wafers are processed. In addition, after wafer processing, the wafer boats are themselves subjected to chemical cleaning processes to remove any particulates and/or other impurities to avoid contamination of any subsequent wafer batches.

  • Formats of various Ceramic wafer carrier are well know in the art and may differ depending on the size and nature of the wafer (e.g., diameters ranging from 100 mm to 500 mm and thicknesses of about 0.15 to about 1.5 mm) and/or the structures of the processing equipment into which the wafers are placed. For example, horizontal wafer boats are used in processes that involve horizontal oxidation furnaces, and vertical wafer boats in processes that involve vertical furnaces.
  •  
  • In conventional practice, a Ceramic wafer carrier is fabricated from a single material. In part this had been considered necessary to eliminate the possibility of a high movement of tolerances under the extreme temperature and chemical conditions, which would result in damage to the boat and/or, more significantly, cause damage to the wafers that are carried on the boat.

 

Ceramic wafer carrier is a loader which can be inserted by silicon wafer. So it is applied in semiconductor area. The cleaning process for quartz boat is very strictly. The boat should be dipped in concentration of 4-5% HF solutions keeped for 4 hours. Then soaked in DI water for 1 hours. Quartz boat, Robuster supplys, can be washed as semicondutor's requirement. We have our own cleaning room.

Robuster supply Ceramic wafer carrier whose degree and diameter can be customized according to customer requirements

1,quartz boat for GaAs semiconductor material

2,purity 99.95% min

3,super tight dimensional tolerance

4,nice appearance

 

 

Mingrui Manufacture zirconia Ceramic wafer carrier used on automatic wafer handling system diffusion furnace .   As zirconia ceramic with the charactheristic of wear resistant ,  high temperature resistant, 

Ceramic wafer carrier is a good choice for wafter carrier .  

 

Integrated wafer loading& unloading, unloading the diffused wafers from the Ceramic wafer carrier

to the cassette or loading the textured wafers from the cassette to theCeramic wafer carrier . Available for double back-to-back wafers in one slot in Ceramic wafer carrier which realize single side diffusion or available for single wafer in a slot for double side diffusion process. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.
 
A Ceramic wafer carrier for housing a semiconductor or a solar wafer comprising
at least one wafer support member containing at least one slot capable of receiving at least a portion of a peripheral edge of a wafer, wherein in the wafer support member comprises silicon carbide; and
at least one structural member for conveying the wafer boat into and out of a processing device connected to the wafer support member , wherein the structural member is comprised of a ceramic material that is not silicon carbide.

 

Technical Characteristics

·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.

·With perfect detection and alarm system which guarantees the stable and automatic operation.

·With circulation method of the cassette baseplate which reduce the labor intensity.

·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;

·With recipe data design which enables the equipment to work with various kinds of Ceramic Quartz Boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.

 

prameter : 

 

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

 

 

Zirconia ceramic date sheet : 

 

Properties Units 95 Alumina 99 Alumina ZrO2
Density g / cm³ 3.65 3.92 5.95-6.0g/cm³
Water absorption % 0 0 0
Coefficient of thermal expansion 10-6/K 7.9 8.5 10.5
Modulus of Elasticity Young's Mod GPa 280 340 210
Poisson's ratio / 0.21 0.22 0.3
HV Hardness HV MPa 1400 1650 1300-1365
Flexural Strength @ room temperature MPa 280 310 950
Flexural Strength @700°C MPa 220 230 210
Compressive Strength @ room temperature MPa 2000 2200 2000
Fracture Toughness MPa *m 1/2 3.8 4.2 10
Heat conductivity @ room temperature W/ m*k 18-25 26-30 2-2.2
Electrical Resistivity @ room temperature Ω*mm2 /m >1015 >1016 >1015
Max use temperature °C 1500 1750 1050
Resistance to acid alkaline / high high high
Dielectric Constant / 9.5 9.8 26
Dielectric Strength KV/mm 16 22 /
Thermol Shock Resistance △ T ( °C ) 220 180-200 280-350
Tensile Strength @ 25 °C MPa 200 248 252

 

 

To see how we can assist you with your solar energy project, contact us today.

 

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

 

Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

 

 

Industrial Ceramic Intriduction

Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.

Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.

 

Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:

 

 

FAQ

Q: Are you trading company or manufacturer ?

A: We are factory.

Q: How long is your delivery time?

A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.

Q: Do you provide samples ? is it free or extra ?

A: Yes, we could offer the sample for free charge but do not pay the cost of freight.

Q: What is your terms of payment ?

A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.


If you have any other question, pls feel free to contact us .

 

 

Contact Details
Dongguan Ming Rui Ceramic Technology Co.,ltd

Contact Person: Admin deng

Tel: 86-18122974730

Send your inquiry directly to us (0 / 3000)

Other Products