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White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier

White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier

    • White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier
    • White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier
    • White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier
    • White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier
  • White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier

    Product Details:

    Place of Origin: Guangdong, China(mainland)
    Brand Name: Mingrui
    Certification: ISO9001-2015
    Model Number: XF-1346

    Payment & Shipping Terms:

    Minimum Order Quantity: 10PCS
    Price: negotiation
    Packaging Details: Packed in PP bag or sponge tray, then put in standard export carton packing, or OEM packing.
    Delivery Time: 10-30 working days after receiving deposit
    Payment Terms: L/C, T/T, Western Union, MoneyGram, Paypal
    Supply Ability: 5000pcs per week
    Contact Now
    Detailed Product Description
    Features: Anti Corrosion Slip Free Product Name: Horizontal Semiconductor Wafer Boat
    Model: Horizontal Wafer Boat Highest Application Temperature: 2200 C, Or Customized
    Bending Strength: 300 MPA, Or Customized Compressive Strength: 3400 MPA, Or Customized
    Density: 3.9g/cm3 , Or Customized Color: White, Yellow, Or Customized
    Size: Customized Application: Wafer Carrier

     

    99% Alumina Ceramic Wafer Boat Horizontal Type Ceramic Wafer Carrier

     

     

    Key words : Alumina ceramic wafer boat /  ceramic wafer carrier 

     

    This type of Horizontal boats for 6inch (Ø150mm) silicon wafer, thickness 675um , material in  99% Al2O3.  

     

    The invention relates to a vertical rack for semiconductor wafer processing having strictly horizontally disposed arms wherein each arm has a rounded tip and a smooth (Ra < 1 < mu >m) upper surface.

     

    The manufacture of semiconductor devices such as integrated circuits typically requires heat treating silicon wafers in the presence of reactive gases. During this process, the temperatures and gas concentrations to which the devices are exposed must be carefully controlled, as the devices often include circuitry elements less than 1 um in size which are sensitive to minute variations in the processing environment.

     
    The semiconductor manufacturing industry typically processes these wafers in either horizontal or vertical carriers. The horizontal carrier, typically called a "boat", has three or four horizontally disposed bars arranged in a semicircle design, with each bar having inwardly facing grooves set therein at regular intervals. Each set of grooves define a vertical space for carrying a vertically disposed wafer. The vertical carrier, typically called a "vertical rack", has three or four vertically disposed rods (or posts) arranged in a semicircle design, with each post having slots set therein at regular intervals to define a space for supporting a horizontally disposed wafer. To insure the geometrical precision required in this field, the three or four rods are fixed to a top plate and a bottom plate. The portions of the post between each slot, termed "teeth", are identically spaced in order to support wafers at regular intervals from and parallel to the bottom plate. The entire rack is then placed within a vertical furnace for processing the wafers.

     

    Horizontal Semiconductor Wafer Boat

     

    Because a wafer processed on a vertical rack experiences less of a temperature gradient over its face (as compared to a wafer processed in a horizontal boat), semiconductor manufacturers are increasingly turning to vertical furnaces. There is, however, a drawback to vertical furnacing. The wafers disposed on a conventional vertical rack are supported at their outside edge only. As such, the areas of the wafer resting on these teeth experience higher stress than the rest of the wafer. When temperatures in the furnace exceed about 1000°C, these stresses often become significant and portions of the single crystal wafer move relative to each other along crystallographic plates in response to that stress. This phenomenon, called "slip", effectively destroys the value of the semiconductor devices located in the area of the wafer where slip has occurred.

     

     

    99% Alumina ceramic wafer boat Features:

    • High purity
    • Excellent electrical & thermal insulator
    • Exceptional temperature resistance up to 3000°F (1650°C)
    • Outstanding corrosion resistance to acids, solvents, salts, and organics
      Unit 95% Al2O3 99% Al2O3 ZrO2 GP-Si3N4
    Color - white ivory white gray
    Density g/cm³ 3.70 3.90 6.04 3.31
    Water Absorption % 0 0 0 0
    Young's Modulus Gpa 280 350 205 295
    Vickers Hardness Gpa 14 20 12 18-20
    Flexural Strength ( at R.T. ) Mpa 280 300 900 650
    Compressive Strength ( at R.T. ) Mpa 2000 2500 2200 2200
    Thermal Conductivity ( at R.T. ) W/(m.K) 18-25 30 2.2 25
    Thermal Shock Resistance ΔT(°C) 220 180-200 280-350 450-650
    Max. Working Temperature ( at R.T. ) °C 1500 1700 800 1200
    Volume Resistivity ( at R.T. ) Ω.cm >10^15 >10^14 >10^12 >10^14
    Dielectric Constant (1 MHz at R.T. ) - 9.50 9.80 26 8.20
    Dielectric Strength kV/mm 16 22 - 16

     

    Typical Characteristics Rotor: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Groove(s) dimensions: Width > 0,051 mm ( .0002") Depth > 0,13 mm ( .0052") Length > 2,00 mm ( .0780") Stator: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Hole diameter: > 0,22 mm x 0,25 mm (.008" x .010") Surface finish, Rotor or Stator Zirconia:  0,025 m (1 in) or N1 Alumina 99,9 %:  0,05 m (2 in) or N2 Alumina 96% or 99,7%:  0,1 to 0,2 m (4 to 8 in) or N3 to N4

     

     

    Advantage of Horizontal Semiconductor Wafer Boat

     

     

     

    They are high corrosion and wear resistance and strong impact resistance and delivers 10 times longer working life than metal plunger. They give a longer life to the sealed packing material.


     

     

    Product Photos Show

     

    White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier

     

     

     

     

    Packaging and Shipping

     

    Packed in PP bag or sponge tray, then put in standard export carton packing, or OEM packing.

    Shipped by Air ( DHL, TNT, UPS, Fedex, EMS ), or Sea transportation.

     

     

     

     

    Company information

     

    Who Are We?
     

    Mingrui is a professional factory with years OEM experience in manufacturing industrial ceramic parts.
     

    What Do We Do?
     

    We produce (OEM ) strengthened structure zirconia and alumina ceramic rod,tube, shaft, plate, sleeve, valve, plunger, bearing, nozzle and ceramic arm, they are applicable to instruments, medical instruments, clocks and electronic products, mills, energy and power, machine and metals, autocar and military, spaceflight and some other high-end fields.
     

    All of our products with certificates, such as , CE, TUV, and so on.

     

    Factory Show

     

    White Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer CarrierWhite Advanced Technical Ceramics , 99% Alumina Ceramic Wafer Boat Horizontal Type Wafer Carrier

     

     

    Our Factory Welcomes Your Visiting!

    Contact Details
    Dongguan Ming Rui Ceramic Technology Co.,ltd

    Contact Person: Admin

    Tel: +8618122974730

    Send your inquiry directly to us (0 / 3000)

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