High Strength Machining Ceramic Parts Ceramic Components for Semiconductor Processing
The structures of ceramic components are very simple. Resistive heating element and Electrode are embedded in the core material of the heater, which is made of Aluminum nitride ceramics by sintering. The maximum temperature of the heater is 800 centigrade. The ceramic heaters and E-Chuck can provide a wide range of stable temperature and have the superior strength under the severe semiconductor manufacturing process.
Semiconductor equipment manufacturers, fabricators and ceramic material manufacturers rely on Mingrui for precision machining of critical components for semiconductor process equipment.
Our extensive knowledge in the machining of glass and ceramics, combined with unique ultrasonic machining capabilities, enable Bullen to provide custom, high-quality, cost-effective solutions meeting the strict requirements of the semiconductor industry.
Mingrui is capable of machining high aspect ratio precision features in 300 mm diameter components in a wide range of semiconductor materials, including CVD Silicon Carbide, Alumina, Sapphire, Aluminum Nitride, Silicon, Silicon Nitride, Yttriaand many others.
Part types machined include:
- Gas distribution plates, showerheads (electrodes)
- Wafer chucks
- Wafer carriers
Typical machining processes include:
- Fabrication of through-hole vias for semiconductor GDPs
- Fabrication of mesas and cavities for wafer carrier or vacuum applications
- OD grinding
- Face grinding
Advantages to working with Mingrui
- Unique ultrasonic machining allows for the machining of multiple features simultaneously, leading to reduced part costs. Learn more about ultrasonic machining.
- Ultrasonic machining is a low MRR process. This means the machined features exhibit little or no subsurface damage, resulting in outstanding particle performance and higher process yields.
- Reliable, consistent high quality means reduced downtime and higher process yields in your process.
- Our ability to handle prototype through production volumes offers you maximum flexibility.
We ( Dongguan Mingrui Ceramic Technology Co., Ltd ) are a professional manufacturer specialized
in R&D, manufacturing and selling customized all kinds of high precision zirconia and alumina ceramic parts . Our main products include ceramic rod , ceramic tube, ceramic plunger, ceramic valve, ceramic plate, ceramic shaft and bearing , ceramic nozzle etc , which are mainly used in industrial fields of Machinery, Petrochemical oil and gas, Valves, Automotive, Food Processing, Fluid Handling, Process Control, Thermal Processing, Aerospace, Defense, Eletronic and Electrical, Textile, Mechanical, Engineering, Mineral Processing, etc.
We have a full service include mold design and development , ceramic forming , precision machining
and precision detection technology. We have achieved great successes in particular requirements
which is based on cooperating with Tsinghua University and getting rich experience by our professional technical engineer teams . Our factory have an unique technical called mirror polishing which improve
our products more smooth , bright than other competitors.
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Quality control process :
1. What kind of industry ceramics do you have ?
We specialized in 95% 97% 99% alumina ceramic and zirconia ceramic parts .
2. What kind of molding method do can you supply ?
Dry Pressing , isostatic pressing , grouting , hot-chamber die casting , tape casting , injection molding, etc, injection molding and isostatic molding is the most commonly used.
3.What stabilizer do you use when processing ?
Yttria stabilizer is the most commonly used in our industrial ceramic parts.
4.Can you produce free samples for me ?
Yes usually , we can produce free samples for you but it is up to the product complexity .
5.What terms can you accept for payment ?
T/T, L/C , Western union , Money Gram and Paypal is welcome , but paypal and western union only for small -sum payment.
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