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Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat

Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat

Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat

Product Details:

Place of Origin: Guangdong, China(mainland)
Brand Name: Mingrui
Certification: ISO9001-2015
Model Number: XF-1012

Payment & Shipping Terms:

Minimum Order Quantity: 10PCS
Price: negotiation
Packaging Details: Packed in PP bag or sponge tray, then put in standard export carton packing, or OEM packing.
Delivery Time: 10-30 working days after receiving deposit
Payment Terms: L/C, T/T, Western Union, MoneyGram, Paypal
Supply Ability: 5000pcs per week
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Detailed Product Description
Features: Anti Corrosion Slip Free Product Name: Semiconductor Wafer Boat
Material: Alumina Ceramic Or Zirconia Highest Application Temperature: 2200 C, Or Customized
Bending Strength: 300 MPA, Or Customized Compressive Strength: 3400 MPA, Or Customized
Density: 3.9g/cm3 , Or Customized Color: White, Yellow, Or Customized
Size: Customized Application: Wafer Carrier

 
 
Ceramic Semiconductor Wafer Boat for Diffusion of 8" Wafer Processing 25 wafer boat
 
 
Key words : Semiconductor Wafer Boat
 
Features:

  • 8" wafer boat is made of ultra-high purity quartz (4N purity) with 1200oC working temperature
  • Can carry 25 piece wafers of 8" diameter in each boat
  • Design for diffusion, oxidation and annealing 4" Si wafer
  • Can fit in GSL1100X-11-III tube furnace
  • Click picture below to see detail mechanical drawing

 
The invention relates to a vertical rack for semiconductor wafer processing having strictly horizontally disposed arms wherein each arm has a rounded tip and a smooth (Ra < 1 < mu >m) upper surface.
 
The manufacture of semiconductor devices such as integrated circuits typically requires heat treating silicon wafers in the presence of reactive gases. During this process, the temperatures and gas concentrations to which the devices are exposed must be carefully controlled, as the devices often include circuitry elements less than 1 um in size which are sensitive to minute variations in the processing environment.

 
The semiconductor manufacturing industry typically processes these wafers in either horizontal or vertical carriers. The horizontal carrier, typically called a "boat", has three or four horizontally disposed bars arranged in a semicircle design, with each bar having inwardly facing grooves set therein at regular intervals. Each set of grooves define a vertical space for carrying a vertically disposed wafer. The vertical carrier, typically called a "vertical rack", has three or four vertically disposed rods (or posts) arranged in a semicircle design, with each post having slots set therein at regular intervals to define a space for supporting a horizontally disposed wafer. To insure the geometrical precision required in this field, the three or four rods are fixed to a top plate and a bottom plate. The portions of the post between each slot, termed "teeth", are identically spaced in order to support wafers at regular intervals from and parallel to the bottom plate. The entire rack is then placed within a vertical furnace for processing the wafers.

 
Alumina Ceramic Wafer Boat
 
Because a wafer processed on a vertical rack experiences less of a temperature gradient over its face (as compared to a wafer processed in a horizontal boat), semiconductor manufacturers are increasingly turning to vertical furnaces. There is, however, a drawback to vertical furnacing. The wafers disposed on a conventional vertical rack are supported at their outside edge only. As such, the areas of the wafer resting on these teeth experience higher stress than the rest of the wafer. When temperatures in the furnace exceed about 1000°C, these stresses often become significant and portions of the single crystal wafer move relative to each other along crystallographic plates in response to that stress. This phenomenon, called "slip", effectively destroys the value of the semiconductor devices located in the area of the wafer where slip has occurred.
 
 
Ceramic Wafer Boat Features:

  • High purity
  • Excellent electrical & thermal insulator
  • Exceptional temperature resistance up to 3000°F (1650°C)
  • Outstanding corrosion resistance to acids, solvents, salts, and organics
  Unit 95% Al2O3 99% Al2O3 ZrO2 GP-Si3N4
Color - white ivory white gray
Density g/cm³ 3.70 3.90 6.04 3.31
Water Absorption % 0 0 0 0
Young's Modulus Gpa 280 350 205 295
Vickers Hardness Gpa 14 20 12 18-20
Flexural Strength ( at R.T. ) Mpa 280 300 900 650
Compressive Strength ( at R.T. ) Mpa 2000 2500 2200 2200
Thermal Conductivity ( at R.T. ) W/(m.K) 18-25 30 2.2 25
Thermal Shock Resistance ΔT(°C) 220 180-200 280-350 450-650
Max. Working Temperature ( at R.T. ) °C 1500 1700 800 1200
Volume Resistivity ( at R.T. ) Ω.cm >10^15 >10^14 >10^12 >10^14
Dielectric Constant (1 MHz at R.T. ) - 9.50 9.80 26 8.20
Dielectric Strength kV/mm 16 22 - 16

 
Typical Characteristics Rotor: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Groove(s) dimensions: Width > 0,051 mm ( .0002") Depth > 0,13 mm ( .0052") Length > 2,00 mm ( .0780") Stator: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Hole diameter: > 0,22 mm x 0,25 mm (.008" x .010") Surface finish, Rotor or Stator Zirconia:  0,025 m (1 in) or N1 Alumina 99,9 %:  0,05 m (2 in) or N2 Alumina 96% or 99,7%:  0,1 to 0,2 m (4 to 8 in) or N3 to N4
 
 
Advantage of Ceramic Wafer Boat
 
1. Isostatic pressed.
2. Fire resistance.
3. Superior mechnical strength.
4. High corrosion and wear resistance.
5. High Temperature Resistance.
6. Good Insulation Performance Precision.
7. Zirconia and alumina ceramic material.
 
They are high corrosion and wear resistance and strong impact resistance and delivers 10 times longer working life than metal plunger. They give a longer life to the sealed packing material.
 
 
Drawings : 
 
Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer BoatCeramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat
 
 
 
Product Photos Show
 
Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat
 
Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat
 
 
 
Packaging and Shipping
 
Packed in PP bag or sponge tray, then put in standard export carton packing, or OEM packing.
Shipped by Air ( DHL, TNT, UPS, Fedex, EMS ), or Sea transportation.
 
Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat
 
 
Company information
 
Who Are We?
 
Mingrui is a professional factory with years OEM experience in manufacturing industrial ceramic parts.
 
What Do We Do?
 
We produce (OEM ) strengthened structure zirconia and alumina ceramic rod,tube, shaft, plate, sleeve, valve, plunger, bearing, nozzle and ceramic arm, they are applicable to instruments, medical instruments, clocks and electronic products, mills, energy and power, machine and metals, autocar and military, spaceflight and some other high-end fields.
 
All of our products with certificates, such as , CE, TUV, and so on.
 
Factory Show
 
Ceramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer BoatCeramic Semiconductor Wafer Boat For Diffusion Of 8" Wafer Processing 25 Wafer Boat
 
 
Our Factory Welcomes Your Visiting!

Contact Details
Dongguan Ming Rui Ceramic Technology Co.,ltd

Contact Person: bella

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