Home ProductsAdvanced Technical Ceramics

White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks

White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks

    • White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks
    • White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks
    • White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks
  • White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks

    Product Details:

    Place of Origin: China
    Brand Name: Mingrui
    Certification: ISO9001 - 2015
    Model Number: XF-1034

    Payment & Shipping Terms:

    Minimum Order Quantity: 1pieces
    Price: negotiable
    Packaging Details: international carton box
    Delivery Time: 15 working days after the order confirmed
    Payment Terms: L/C, T/T, Western Union, MoneyGram, D/P, D/A
    Supply Ability: 1000 pieces per month
    Contact Now
    Detailed Product Description
    Item: Ceramic E Chucks Machine: Semiconductor Equipment
    Semiconductor: Yes Function: Pick Up Wafer
    Type: Semiconductor Ceramic Shape: Custom
    Dimension: Custom Finishing: With Groove
    Port Type: Vacuum Port Sample: Available

     

    Ceramic Insulator Plates for Electrostatic Chucks / E-chucks for Semiconductor Equipment

     

    Semiconductor Ceramic E-chuck Product Description

     

    Products : Chucks and wafer end-effectors

    Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
    These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.

    Applications

    Ceramic components can be used in the following semiconductor process equipment :

    • Deposition and ion implant machines
    • Chemical wet etching equipment
    • Failure-analysis machines
    • Electrostatic chucks

    Products

     

    Mingrui can offer the following products :

    • Insulator plates for electrostatic chucks (E-chucks)
    • Base plates for thermo chucks
    • End-effectors

    Materials

     

    The most commonly used ceramic materials are :

    • Alumina – or aluminium oxide – 99,6 % minimum
    • Sintered and CVC silicon carbide.

    Ceramic End - Effectors, Endeffector, Endeffectors, Wafer Carrier, Wafer Chuck, Wafer Pick - Up Tools, Wafer Tools: NetMotion, Inc. web site

    Semiconductor Ceramic Arm  Keywords & Tags

    Features Wafer Chuck/End Effector More details, click here Model/ Designs Properties and Application Note Properties & Application Note End - Effectors Netmotion, Alumina, serial comminication controller, Semiconductor supply, Fabs, Alumina Tubing, Microstep motor, stepper Motor Driver, Motor Controllers, Stepper Oscillator Driver, Semiconductor Fabrication Products, Clean Room Products, Clean Room, Clea htm files wh effectors

    Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. the durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in chemically harsh environment.
     
    • Standard paddle and fork designs
    • For 4", 5", 6", 8" and 12" wafers
    • Vacuum and non-vacuum
    • High temperature resistance
    • Chemical resistance
    • Durable and reliable


     
    Standard 12" and 8" Coated Alumina End-Effectors
          Download/View Video Clip (MPEG File 3.8MB)
     
    Standard Alumina Paddle Design 4"~12" Standard Alumina Fork Design 4" ~ 8"
       
       
    Size Part Number
    4" CEFV04PA
    6" CEFV06PA
    8" CEFV08PA
    12" CEFV12PA
    Size Part Number
    4" CEFV04FK
    6" CEFV06FK
    8" CEFV08FK
    Type of Ceramic Purity Color Vacuum Non-Vacuum
    Alumina 99.5% White Yes Yes
    Alumina 99.6% Cream Yes Yes
    Alumina 99.9% Cream No Yes
    Silicon Carbide (SiC) 98.0% Black Yes Yes
     
    Properties & Application Note
     
    Ceramic End-Effector Properties
    Properties Alumina Silicon Carbide (SiC)
    Purity 99.9% 99.6% 99.5% 98.0%
    Chemical Composition A1203 A1203 A1203 SiC
    Color Ivory Dark Ivory White Black
    Density (g/cm3) 3.95 3.94 3.94 3.14
    Flexural Strength (kg/mm2) 40 38 45 51
    Vicker Hardness 1,800 1,500 1,500 3,100
    Young Ratio (104kgf/mm2) 3.9 4 3.9 4.2
    Composition Strength (MN/m3/2) 4 4 4 2.4
    Coefficient of Thermal Expansion (10-6) 7.9 8 8 3.4
    Thermal Conductivity (Cal/sec/cm) 0.07 0.07 0.07 0.33
    Volume Resistivity (>&=cm) >10-14 >10-14 >10-14 106
    Dielectric Constant 10.5 11 11.5 --
    Dissipation Factor (10-4MHz) -- 8.0 4.8 --
    Breakdown voltage (kv/mm) 15 13 15 --
    Application Note
     

    In robotics, an end-effector is a device or toll connected to the end of a robot arm. The structure of an end effector (see figure on the left and right), and the nature of the programming and hardware that drives it, depends on the intended task.

    A robot arm can accommodate only certain end-effector task modes without changes to the ancillary hardware and/or programming. It is not possible to directly replace a gripper with a screwdriver head, for example, and expect a favorable result. It is necessary to change the programming of the robot controller and use a different set of end-effector motors to facilitate torque rather than gripping force. Then the gripper can be replaced with a driver head.

     

     

    End effectors constitute the end of the robot arm which handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.

     

    Ceramic end effectors are used for their stiffness and high strength, meaning the robot arm settles to its final position faster than with aluminium. Additionally, the robot’s motion itself is faster, optimising positioning accuracy and increasing efficiency.

     

    The ceramic material is chosen based on the deposition chemistry to which it will be exposed. For example, if plasma is used, a minimum 99.5% alumina must be used.

    The same consideration of gas chemistry is needed for determining the interior materials for plasma etch processes. If an anodised aluminium or alumina chamber is used with fluorinated gases or oxygen plasma then an yttria coating may be used on theanodised aluminium walls to prevent chemical attack. Yttria has superior erosion resistance and low particulation compared with alumina or thermal spray alumina coating.

     

     

    Related product photo: 

    White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks

    White Advanced Technical Ceramics Insulator Plates for Electrostatic Chucks / E-chucks

     


    Industrial Ceramic Intriduction
    Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.
    Company Introduction

    Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.
     
    FAQ
    Q: Are you trading company or manufacturer ?
    A: We are factory.
    Q: How long is your delivery time?
    A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.
    Q: Do you provide samples ? is it free or extra ?
    A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
    Q: What is your terms of payment ?
    A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.
    If you have any other question, pls feel free to contact us .

     
     
     
     
     

    Contact Details
    Dongguan Ming Rui Ceramic Technology Co.,ltd

    Contact Person: Admin deng

    Tel: 86-18122974730

    Send your inquiry directly to us (0 / 3000)

    Other Products