Chemical Corrosive Zirconia Ceramic Wafer Boat in Semiconductor Chip Processing
Key word: Ceramic wafer carrier
To reduce and/or eliminate damage to wafers during the process steps and during transport to and from the various devices, the wafers are carried on carrier devices or “Ceramic wafer carrier ”. The wafer boats are necessarily subjected to the same corrosive chemicals and/or high temperatures under which the wafers are processed. In addition, after wafer processing, the wafer boats are themselves subjected to chemical cleaning processes to remove any particulates and/or other impurities to avoid contamination of any subsequent wafer batches.
Formats of various Ceramic wafer carrier are well know in the art and may differ depending on the size and nature of the wafer (e.g., diameters ranging from 100 mm to 500 mm and thicknesses of about 0.15 to about 1.5 mm) and/or the structures of the processing equipment into which the wafers are placed. For example, horizontal wafer boats are used in processes that involve horizontal oxidation furnaces, and vertical wafer boats in processes that involve vertical furnaces.
In conventional practice, a Ceramic wafer carrier is fabricated from a single material. In part this had been considered necessary to eliminate the possibility of a high movement of tolerances under the extreme temperature and chemical conditions, which would result in damage to the boat and/or, more significantly, cause damage to the wafers that are carried on the boat.
Ceramic wafer carrier is a loader which can be inserted by silicon wafer. So it is applied in semiconductor area. The cleaning process for quartz boat is very strictly. The boat should be dipped in concentration of 4-5% HF solutions keeped for 4 hours. Then soaked in DI water for 1 hours. Quartz boat, Robuster supplys, can be washed as semicondutor's requirement. We have our own cleaning room.
Robuster supply Ceramic wafer carrier whose degree and diameter can be customized according to customer requirements
1,quartz boat for GaAs semiconductor material
2,purity 99.95% min
3,super tight dimensional tolerance
Mingrui Manufacture zirconia Ceramic wafer carrier used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant,
Ceramic wafer carrier is a good choice for wafter carrier .
Integrated wafer loading& unloading, unloading the diffused wafers from the Ceramic wafer carrier
to the cassette or loading the textured wafers from the cassette to theCeramic wafer carrier . Available for double back-to-back wafers in one slot in Ceramic wafer carrier which realize single side diffusion or available for single wafer in a slot for double side diffusion process. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.
A Ceramic wafer carrier
for housing a semiconductor or a solar wafer comprising
at least one wafer support member containing at least one slot capable of receiving at least a portion of a peripheral edge of a wafer, wherein in the wafer support member comprises silicon carbide; and
at least one structural member for conveying the wafer boat into and out of a processing device connected to the wafer support member , wherein the structural member is comprised of a ceramic material that is not silicon carbide.
·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.
·With perfect detection and alarm system which guarantees the stable and automatic operation.
·With circulation method of the cassette baseplate which reduce the labor intensity.
·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;
·With recipe data design which enables the equipment to work with various kinds of Ceramic Quartz Boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.
Zirconia ceramic date sheet :
||g / cm³
|Coefficient of thermal expansion
|Modulus of Elasticity Young's Mod
|HV Hardness HV
|Flexural Strength @ room temperature
|Flexural Strength @700°C
|Compressive Strength @ room temperature
||MPa *m 1/2
|Heat conductivity @ room temperature
|Electrical Resistivity @ room temperature
|Max use temperature
|Resistance to acid alkaline
|Thermol Shock Resistance
||△ T ( °C )
|Tensile Strength @ 25 °C
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Industrial Ceramic Intriduction
Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.
Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:
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